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技術支持 Technologies

橢偏儀技術

發布者:眺望科技                     發布日期:2018-03-30

he FS-1 uses the power of ellipsometry to optically characterize samples.  In an ellipsometer system, the Polarization State Generator (PSG) emits light with a known polarization, which is obliquely incident on the sample, and the Polarization State Detector (PSD) measures the polarization state of the light reflected from the sample.

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The change in polarization state caused by the sample reflection can be defined by the ratio of the sample reflectivity for p-polarized light (Rp), over the sample reflectivity for s-polarized light (Rs).  This ratio is a complex number, which is typically denoted by ρ (rho), and is often reported in terms of the ellipsometric parameters Ψ (Psi) and Δ (Delta), as defined by the following equation.  According to this equation, tan(Ψ) defines the magnitude of the reflectivity ratio for p- and s- polarized light, and Δ defines the phase difference between the reflected p- and s- polarized light.

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An alternate representation of the ellipsometric parameters is shown below. The N, C, and S ellipsometric parameters can be calculated in terms of the Ψ (Psi) and Δ (Delta) parameters, assuming the sample is isotropic and non-depolarizing. One of the advantages of the N,C,S representation of the ellipsometric parameters is that if the sample is depolarizing, the degree of polarization P can also be reported.

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The ellipsometric parameters measured on the sample (and reported in either the Ψ/Δ or N,C,S representation) can be further analyzed to determine sample properties of interest, such as film thicknesses and optical constants.

 

400-615-4535
400-615-4535
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